Paper Title:
Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
193-200
DOI
10.4028/www.scientific.net/MSF.287-288.193
Citation
F. Richter, G. Krannich, M. Kühn, S. Peter, C. Spaeth, "Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition", Materials Science Forum, Vols. 287-288, pp. 193-200, 1998
Online since
August 1998
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Price
$32.00
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