Paper Title:
Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
211-214
DOI
10.4028/www.scientific.net/MSF.287-288.211
Citation
R. Krawietz, W. Pompe, A. Gerbatsch, V. Sergo, L.C. Ciacchi, "Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon", Materials Science Forum, Vols. 287-288, pp. 211-214, 1998
Online since
August 1998
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Price
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