Paper Title:
Material-Selective Planarization of Oxide Layers: A Novel Technology
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
227-230
DOI
10.4028/www.scientific.net/MSF.287-288.227
Citation
T. Detzel, P. Hanesch, "Material-Selective Planarization of Oxide Layers: A Novel Technology", Materials Science Forum, Vols. 287-288, pp. 227-230, 1998
Online since
August 1998
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Price
$32.00
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