Paper Title:
Depth Profiling of Thin TiSix-Films on Silicon Carbide by SNMS
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
231-234
DOI
10.4028/www.scientific.net/MSF.287-288.231
Citation
R. Getto, J. Freytag, M. Kopnarski, H. Oechsner, "Depth Profiling of Thin TiSix-Films on Silicon Carbide by SNMS", Materials Science Forum, Vols. 287-288, pp. 231-234, 1998
Online since
August 1998
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Price
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