Paper Title:
Flowfill-Process as a New Concept for Inter-Metal-Dielectrics
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
235-238
DOI
10.4028/www.scientific.net/MSF.287-288.235
Citation
U. Höckele, W. Kröninger, G. Pfeiffer, M.M. Frank, J. Marktanner, K. Beekmann, "Flowfill-Process as a New Concept for Inter-Metal-Dielectrics", Materials Science Forum, Vols. 287-288, pp. 235-238, 1998
Online since
August 1998
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Price
$32.00
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