Paper Title:
Properties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
247-250
DOI
10.4028/www.scientific.net/MSF.287-288.247
Citation
M. Ruske, G. Bräuer, J. Pistner, J. Szczyrbowski, A. Zmelty, "Properties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron Sputtering", Materials Science Forum, Vols. 287-288, pp. 247-250, 1998
Online since
August 1998
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Price
$32.00
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