Paper Title:
Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
267-268
DOI
10.4028/www.scientific.net/MSF.287-288.267
Citation
J. Patscheider, M. Diserens, F. Lévy, "Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering", Materials Science Forum, Vols. 287-288, pp. 267-268, 1998
Online since
August 1998
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Price
$32.00
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