Paper Title:
Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
275-282
DOI
10.4028/www.scientific.net/MSF.287-288.275
Citation
M. Ye, G. Berton, J.-.L. Delplancke, M.-P. Delplancke, L. Segers, R. Winand, K. De Bruyn, "Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates", Materials Science Forum, Vols. 287-288, pp. 275-282, 1998
Online since
August 1998
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