Paper Title:
Coating Deposition by Condensing the Particle Flux from the Target Sputtered in the Low-Pressure Arc Plasma
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
291-294
DOI
10.4028/www.scientific.net/MSF.287-288.291
Citation
I.I. Aksenov, V.M. Khoroshikh, "Coating Deposition by Condensing the Particle Flux from the Target Sputtered in the Low-Pressure Arc Plasma", Materials Science Forum, Vols. 287-288, pp. 291-294, 1998
Online since
August 1998
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