Paper Title:
Study of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-Probe
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
299-302
DOI
10.4028/www.scientific.net/MSF.287-288.299
Citation
T.A. Beer, D. Heim, J. Laimer, H. Störi, "Study of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-Probe", Materials Science Forum, Vols. 287-288, pp. 299-302, 1998
Online since
August 1998
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Price
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