Paper Title:
Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
3-22
DOI
10.4028/www.scientific.net/MSF.287-288.3
Citation
P. Awakowicz, "Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry", Materials Science Forum, Vols. 287-288, pp. 3-22, 1998
Online since
August 1998
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Price
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