Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry |
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| Journal | Materials Science Forum (Volumes 287 - 288) |
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| Volume | Trends and New Applications of Thin Films |
| Edited by | Horst Hoffmann |
| Pages | 3-22 |
| DOI | 10.4028/www.scientific.net/MSF.287-288.3 |
| Authors | P. Awakowicz |
| Keywords | Diagnostics, Energy-Mass Spectrometry, Optical Emission Spectroscopy, Probe Measurements |
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