Paper Title:
Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
303-306
DOI
10.4028/www.scientific.net/MSF.287-288.303
Citation
V.A. Belous, G.I. Nosov, "Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source", Materials Science Forum, Vols. 287-288, pp. 303-306, 1998
Online since
August 1998
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Price
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