Paper Title:
Vacuum-Arc Evaporator of Metals with an Extended Planar Cathode
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
323-326
DOI
10.4028/www.scientific.net/MSF.287-288.323
Citation
L.P. Sablev, A.A. Andreev, V.V. Kunchenko, S.N. Grigoriev, "Vacuum-Arc Evaporator of Metals with an Extended Planar Cathode", Materials Science Forum, Vols. 287-288, pp. 323-326, 1998
Online since
August 1998
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Price
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