Paper Title:
High Current Metal-Ion Source for Activated Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
331-332
DOI
10.4028/www.scientific.net/MSF.287-288.331
Citation
T. Witke, P. Siemroth, "High Current Metal-Ion Source for Activated Deposition", Materials Science Forum, Vols. 287-288, pp. 331-332, 1998
Online since
August 1998
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Price
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