Paper Title:
Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
383-388
DOI
10.4028/www.scientific.net/MSF.287-288.383
Citation
C. Specht, J. Schroeder, R. Wittorf, M. Grischke, K. Bewilogua, "Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering", Materials Science Forum, Vols. 287-288, pp. 383-388, 1998
Online since
August 1998
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Price
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