Paper Title:
Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
401-406
DOI
10.4028/www.scientific.net/MSF.287-288.401
Citation
N. Martin, C. Rousselot, "Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System", Materials Science Forum, Vols. 287-288, pp. 401-406, 1998
Online since
August 1998
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