Paper Title:
In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
493-496
DOI
10.4028/www.scientific.net/MSF.287-288.493
Citation
H. Hammer, H. Busse, R. Kiefer, "In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering", Materials Science Forum, Vols. 287-288, pp. 493-496, 1998
Online since
August 1998
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Price
$32.00
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