Paper Title:
Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
497-498
DOI
10.4028/www.scientific.net/MSF.287-288.497
Citation
M. Schafft, H. Oechsner, "Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD", Materials Science Forum, Vols. 287-288, pp. 497-498, 1998
Online since
August 1998
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Price
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