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Trends and New Applications of Thin Films

Materials Science Forum Volumes 287 - 288

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• p193 Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition   [ 244 K ]
  Authors: F. Richter, G. Krannich, M. Kühn, S. Peter, Ch. Spaeth
• p201 Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures   [ 243 K ]
  Authors: T. Golnas, F.B. Prinz
• p205 Novel Three Dimensionally Integrated Thin Film Color Detector for Digital Signal Processing   [ 255 K ]
  Authors: D. Knipp, H. Stiebig, O. Kluth, H. Wagner
• p211 Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon   [ 167 K ]
  Authors: R. Krawietz, W. Pompe, A. Gerbatsch, V. Sergo, L.C. Ciacchi
• p215 Photoinduced Effects in Thin Amorphous Chalcogenide Films   [ 266 K ]
  Authors: K. Petkov
• p221 Optimized Amorphous Silicon Based Two-Terminal Thin Film Detectors for Color Recognition   [ 247 K ]
  Authors: J. Zimmer, D. Knipp, H. Stiebig, H. Wagner
• p227 Material-Selective Planarization of Oxide Layers: A Novel Technology   [ 245 K ]
  Authors: Th. Detzel, P. Hanesch
• p231 Depth Profiling of Thin TiSi_x-Films on Silicon Carbide by SNMS   [ 231 K ]
  Authors: R. Getto, J. Freytag, M. Kopnarski, H. Oechsner
• p235 Flowfill-Process as a New Concept for Inter-Metal-Dielectrics   [ 311 K ]
  Authors: U. Höckele, W. Kröninger, G. Pfeiffer, M.M. Frank, J. Marktanner, K. Beekmann
• p239 Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc   [ 36 K ]
  Authors: P. Siemroth, P. Wenzel, Th. Witke, Bernd Schultrich
• p243 High Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon Films   [ 283 K ]
  Authors: H. Banzhof, K. Brand, H. Lichte, A. Luft, F.-C. Meyer, H.-J. Scheibe, Bernd Schultrich, H. Ziegele
• p247 Properties of Si₃N₄-Layers Deposited by Medium Frequency Twin Magnetron Sputtering   [ 175 K ]
  Authors: M. Ruske, G. Bräuer, J. Pistner, J. Szczyrbowski, A. Zmelty
• p251 On the Initial Cubic Phase Nucleation in Boron Nitride Films   [ 41 K ]
  Authors: J. Ye, H. Oechsner
• p255 Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation   [ 198 K ]
  Authors: L. Dumas, J.-Y. Robic, Yves Pauleau
• p259 Gradient Interface Layers to Improve c-BN Thin Film Adhesion   [ 247 K ]
  Authors: Renate Freudenberger, S. Reinke, Wilhelm Kulisch, Rodica Fischer, J. Zweck, A. Bergmaier, G. Dollinger