Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition |
| Journal |
Materials Science Forum (Volumes 315 - 317) |
| Volume |
Rare Earths '98 |
| Edited by |
R.C. Woodward |
| Pages |
216-221 |
| DOI |
10.4028/www.scientific.net/MSF.315-317.216 |
| Citation |
K. Kukli et al., 1999, Materials Science Forum, 315-317, 216 |
| Authors |
K. Kukli, M. Peussa, L.-S. Johansson, E. Nykänen, L. Niinistö |
| Keywords |
Atomic Layer Epitaxy, Thin Film, Yttrium Oxysulfide, β-Diketonate Precursor |
| Full Paper |
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