Paper Title:
Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition
  Abstract

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Periodical
Materials Science Forum (Volumes 315-317)
Main Theme
Edited by
R.C. Woodward
Pages
216-221
DOI
10.4028/www.scientific.net/MSF.315-317.216
Citation
K. Kukli, M. Peussa, L.-S. Johansson, E. Nykänen, L. Niinistö, "Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition", Materials Science Forum, Vols. 315-317, pp. 216-221, 1999
Online since
July 1999
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Price
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