Paper Title:
Aluminium Nitride Coatings Preparation Using a Chemical Vapour Deposition Process
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 325-326)
Edited by
S. Hampshire, M.J. Pomeroy
Pages
125-130
DOI
10.4028/www.scientific.net/MSF.325-326.125
Citation
B. Armas, C. Combescure, M. De Icaza Herrera, F. Sibieude, "Aluminium Nitride Coatings Preparation Using a Chemical Vapour Deposition Process", Materials Science Forum, Vols. 325-326, pp. 125-130, 2000
Online since
January 2000
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Price
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