Aluminium Nitride Coatings Preparation Using a Chemical Vapour Deposition Process |
| Journal |
Materials Science Forum (Volumes 325 - 326) |
| Volume |
Nitrides and Oxynitrides |
| Edited by |
S. Hampshire, M.J. Pomeroy |
| Pages |
125-130 |
| DOI |
10.4028/www.scientific.net/MSF.325-326.125 |
| Citation |
B. Armas et al., 2000, Materials Science Forum, 325-326, 125 |
| Authors |
B. Armas, C. Combescure, M. De Icaza Herrera, Francois Sibieude |
| Keywords |
Aluminium Chloride, Ammonia, Apparent Activation Energy, Crystal Growth, Deposition Rate, Hydrogen, Morphology, Nitrogen, X-Ray Diffraction (XRD) |
| Full Paper |
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