Paper Title:

Aluminium Nitride Coatings Preparation Using a Chemical Vapour Deposition Process

Periodical Materials Science Forum (Volumes 325 - 326)
Main Theme Nitrides and Oxynitrides
Edited by S. Hampshire, M.J. Pomeroy
Pages 125-130
DOI 10.4028/www.scientific.net/MSF.325-326.125
Citation B. Armas et al., 2000, Materials Science Forum, 325-326, 125
Authors B. Armas, C. Combescure, M. De Icaza Herrera, Francois Sibieude
Keywords Aluminium Chloride, Ammonia, Apparent Activation Energy, Crystal Growth, Deposition Rate, Hydrogen, Morphology, Nitrogen, X-Ray Diffraction (XRD)
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