Paper Title:
A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 325-326)
Edited by
S. Hampshire, M.J. Pomeroy
Pages
131-140
DOI
10.4028/www.scientific.net/MSF.325-326.131
Citation
C.G.H. Walker, S.A. Morton, J.M. Charnock, E.J. MacLean, N. M.D. Brown, "A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition", Materials Science Forum, Vols. 325-326, pp. 131-140, 2000
Online since
January 2000
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Price
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