A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition |
| Journal |
Materials Science Forum (Volumes 325 - 326) |
| Volume |
Nitrides and Oxynitrides |
| Edited by |
S. Hampshire, M.J. Pomeroy |
| Pages |
131-140 |
| DOI |
10.4028/www.scientific.net/MSF.325-326.131 |
| Citation |
C.G.H. Walker et al., 2000, Materials Science Forum, 325-326, 131 |
| Authors |
C.G.H. Walker, S.A. Morton, J.M. Charnock, E.J. MacLean, N.M.D. Brown |
| Keywords |
Auger Parameter, CaF2, Disorder, EXAFS, XANES, X-Ray Diffraction (XRD), X-Ray Photoelectron Spectroscopy (XPS) |
| Full Paper |
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