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Enlargement of SiC Single Crystal: Enhancement of Lateral Growth using Tapered Graphite Lid

Journal Materials Science Forum (Volumes 338 - 342)
Volume Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 103-106
DOI 10.4028/www.scientific.net/MSF.338-342.103
Citation Wook Bahng et al., 2000, Materials Science Forum, 338-342, 103
Authors Wook Bahng, Yasuo Kitou, Shinichi Nishizawa, Hirotaka Yamaguchi, Muhammad Nasir Khan, Naoki Oyanagi, Kazuo Arai, Shigehiro Nishino
Keywords Cone-Shaped Platform, Lateral Growth, Polycrystals, PVT Growth, Rapid Enlargement, Single Crystal, Taper Angle
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