Paper Title:
Real-Time Assessment of Overlayer Removal on 4H-SiC Surfaces: Techniques and Relevance to Contact Formation
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1033-1036
DOI
10.4028/www.scientific.net/MSF.338-342.1033
Citation
N.V. Edwards, L. D. Madsen, K. Robbie, G.D. Powell, K. Järrendahl, C. Cobet, N. Esser, W. Richter, D.E. Aspnes, "Real-Time Assessment of Overlayer Removal on 4H-SiC Surfaces: Techniques and Relevance to Contact Formation", Materials Science Forum, Vols. 338-342, pp. 1033-1036, 2000
Online since
May 2000
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.