Paper Title:
SiC In-Situ Pre-Growth Etching: A Thermodynamic Study
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1041-1044
DOI
10.4028/www.scientific.net/MSF.338-342.1041
Citation
E. Neyret, L. Di Cioccio, E. Blanquet, C. Raffy, C. Pudda, T. Billon, J. Camassel, "SiC In-Situ Pre-Growth Etching: A Thermodynamic Study", Materials Science Forum, Vols. 338-342, pp. 1041-1044, 2000
Online since
May 2000
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Price
$32.00
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