Paper Title:
Demonstration of Deep (80μm) RIE Etching of SiC for MEMS and MMIC Applications
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1053-1056
DOI
10.4028/www.scientific.net/MSF.338-342.1053
Citation
D. C. Sheridan, J. B. Casady, C.E. Ellis, R.R. Siergiej, J.D. Cressler, R.M. Strong, W.M. Urban, W.F. Valek, C.F. Seiler, H. Buhay, "Demonstration of Deep (80μm) RIE Etching of SiC for MEMS and MMIC Applications", Materials Science Forum, Vols. 338-342, pp. 1053-1056, 2000
Online since
May 2000
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.