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Atomic-Scale Engineering of the SiC-SiO2 Interface

Journal Materials Science Forum (Volumes 338 - 342)
Volume Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 1133-1136
DOI 10.4028/www.scientific.net/MSF.338-342.1133
Citation Sokrates T. Pantelides et al., 2000, Materials Science Forum, 338-342, 1133
Authors Sokrates T. Pantelides, G. Duscher, M. Di Ventra, Ryszard Buczko, K. McDonald, M.B. Huang, Robert A. Weller, Israel J.R. Baumvol, Fernanda Chiarello Stedile, C. Radtke, S.J. Pennycook, G.Y. Chung, Chin Che Tin, John R. Williams, J.H. Won, Leonard C. Feldman
Keywords Interface States (or Traps), Interface Structure, Nitrogen, Oxidation
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