Paper Title:
Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1141-1144
DOI
10.4028/www.scientific.net/MSF.338-342.1141
Citation
X. Y. Song, S. Guo, C. A. Zorman, C.-H. Wu, A.A. Yasseen, M. Mehregany, "Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining", Materials Science Forum, Vols. 338-342, pp. 1141-1144, 2000
Online since
May 2000
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