Paper Title:
Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1145-1148
DOI
10.4028/www.scientific.net/MSF.338-342.1145
Citation
N. Rajan, C. A. Zorman, M. Mehregany, "Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching", Materials Science Forum, Vols. 338-342, pp. 1145-1148, 2000
Online since
May 2000
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Price
$32.00
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