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Characterization of Au Schottky Contacts on p-Type 3C-SiC Gown by Low Pressure Chemical Vapor Deposition

Journal Materials Science Forum (Volumes 338 - 342)
Volume Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 1239-1242
DOI 10.4028/www.scientific.net/MSF.338-342.1239
Citation Kazutoshi Kojima et al., 2000, Materials Science Forum, 338-342, 1239
Authors Kazutoshi Kojima, Masahito Yoshikawa, Takeshi Ohshima, Hisayoshi Itoh, Sohei Okada
Keywords 3C-SiC, Low Pressure CVD, p-Type, Schottky Barrier Height, Schottky Contact
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