Paper Title:
Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures
  Abstract

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Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1283-1286
DOI
10.4028/www.scientific.net/MSF.338-342.1283
Citation
K. Fukuda, S. Suzuki, J. Senzaki, R. Kosugi, K. Nagai, T. Sekigawa, H. Okushi, S. Yoshida, T. Tanaka, K. Arai, "Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures", Materials Science Forum, Vols. 338-342, pp. 1283-1286, 2000
Online since
May 2000
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