Paper Title:
Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HTCVD Crystal Growth Developments
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
131-136
DOI
10.4028/www.scientific.net/MSF.338-342.131
Citation
A. Ellison, J. Zhang, W. Magnusson, A. Henry, Q. Wahab, P. Bergman, C. G. Hemmingsson, N. T. Son, E. Janzén, "Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HTCVD Crystal Growth Developments", Materials Science Forum, Vols. 338-342, pp. 131-136, 2000
Online since
May 2000
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Price
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