Paper Title:
Investigation into the Film Growth of AlN on SiC by Low Pressure Chemical Vapour Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1507-1510
DOI
10.4028/www.scientific.net/MSF.338-342.1507
Citation
V. Williams, E. Pernot, E. Ramberg, E. Blanquet, J. M. Bluet, R. Madar, "Investigation into the Film Growth of AlN on SiC by Low Pressure Chemical Vapour Deposition", Materials Science Forum, Vols. 338-342, pp. 1507-1510, 2000
Online since
May 2000
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Price
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