Paper Title:
Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC
  Abstract

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Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
1519-1522
DOI
10.4028/www.scientific.net/MSF.338-342.1519
Citation
S. Tungasmita, P.O.Å. Persson, K. Järrendahl, L. Hultman, J. Birch, "Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC", Materials Science Forum, Vols. 338-342, pp. 1519-1522, 2000
Online since
May 2000
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