Paper Title:
Multi-Wafer VPE Growth and Characterization of SiC Epitaxial Layers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
173-176
DOI
10.4028/www.scientific.net/MSF.338-342.173
Citation
H.D. Nordby, Jr., M. J. O'Loughlin, M. F. MacMillan, A. A. Burk, J. D. Oliver , "Multi-Wafer VPE Growth and Characterization of SiC Epitaxial Layers", Materials Science Forum, Vols. 338-342, pp. 173-176, 2000
Online since
May 2000
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Price
$32.00
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