Paper Title:
Carbonization of SIMOX Substrates for Fabrication of Single-crystal SiC-on-insulator
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
297-300
DOI
10.4028/www.scientific.net/MSF.338-342.297
Citation
S. Harada, M. Arita, Y. Ikoma, T. Motooka, "Carbonization of SIMOX Substrates for Fabrication of Single-crystal SiC-on-insulator", Materials Science Forum, Vols. 338-342, pp. 297-300, 2000
Online since
May 2000
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Price
$32.00
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