Paper Title:
The Growth and Characterization of 3C-SiC/SiNx/Si Structure
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
317-320
DOI
10.4028/www.scientific.net/MSF.338-342.317
Citation
K. C. Kim, C. I. Park, K. S. Nahm, E. K. Suh, "The Growth and Characterization of 3C-SiC/SiNx/Si Structure", Materials Science Forum, Vols. 338-342, pp. 317-320, 2000
Online since
May 2000
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Price
$32.00
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