Paper Title:
Surface Studies on Thermal Oxidation on 4H-SiC Epilayer
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
403-406
DOI
10.4028/www.scientific.net/MSF.338-342.403
Citation
A. Koh, A. Kestle, S.P. Wilks, P.R. Dunstan, C.J. Wright, M. Pritchard, G. Pope, P. A. Mawby, W.R. Bowen, "Surface Studies on Thermal Oxidation on 4H-SiC Epilayer", Materials Science Forum, Vols. 338-342, pp. 403-406, 2000
Online since
May 2000
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Price
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