Paper Title:
Quantified Conditions for Reduction of ESO Contamination During SiC Metalization
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
407-410
DOI
10.4028/www.scientific.net/MSF.338-342.407
Citation
G.Y. McDaniel, S.T. Fenstermaker, D.E. Walker Jr., W.V. Lampert, S.M. Mukhopadhyay, P.H. Holloway, "Quantified Conditions for Reduction of ESO Contamination During SiC Metalization", Materials Science Forum, Vols. 338-342, pp. 407-410, 2000
Online since
May 2000
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Price
$32.00
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