Paper Title:
Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
453-456
DOI
10.4028/www.scientific.net/MSF.338-342.453
Citation
M. Shamsuzzoha, S. E. Saddow, T.E. Schattner, L. Jin, M. Dudley, S.V. Rendakova, V. Dmitriev, "Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes", Materials Science Forum, Vols. 338-342, pp. 453-456, 2000
Online since
May 2000
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Price
$32.00
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