Seed Surface Preparation for SiC Sublimation Growth |
| Journal |
Materials Science Forum (Volumes 338 - 342) |
| Volume |
Silicon Carbide and Related Materials - 1999 |
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
47-50 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.47 |
| Authors |
Bernard Pelissier,
Cécile Moulin,
Etienne Pernot,
Mikhail Anikin,
Philippe Grosse,
Christian Faure,
Bernard Ferrand,
M. Couchaud,
Gérard Basset,
Roland Madar
|
| Keywords |
Ex Situ Seed Preparation, In Situ Sublimation Etching, Step Flow Growth, Sublimation Growth |
| Full Paper |
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