Paper Title:
X-ray Characterization of 3 inch Diameter 4H and 6H-SiC Experimental Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
473-476
DOI
10.4028/www.scientific.net/MSF.338-342.473
Citation
T.A. Kuhr, W. M. Vetter, M. Dudley, M. Skowronski, "X-ray Characterization of 3 inch Diameter 4H and 6H-SiC Experimental Wafers", Materials Science Forum, Vols. 338-342, pp. 473-476, 2000
Online since
May 2000
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Price
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