Paper Title:
Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
481-484
DOI
10.4028/www.scientific.net/MSF.338-342.481
Citation
T. Henkel, G. Ferro, S. I. Nishizawa, H. Pressler, Y. Tanaka, H. Tanoue, N. Kobayashi, "Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching", Materials Science Forum, Vols. 338-342, pp. 481-484, 2000
Online since
May 2000
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.