Single Crystal Growth of 6H-SiC on Saw-Damaged Substrate by Sublimation Method |
| Journal |
Materials Science Forum (Volumes 338 - 342) |
| Volume |
Silicon Carbide and Related Materials - 1999 |
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
51-54 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.51 |
| Citation |
Sohei Okada et al., 2000, Materials Science Forum, 338-342, 51 |
| Authors |
Sohei Okada, Taro Nishiguchi, T. Shimizu, Makato Sasaki, S. Oshima, Shigehiro Nishino |
| Keywords |
Defect, Micropipe, Polytype, Saw-Damage, Sublimation Method |
| Full Paper |
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