Paper Title:
Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
525-528
DOI
10.4028/www.scientific.net/MSF.338-342.525
Citation
M. H. Hong, J. Chung, F. Namavar, P. Pirouz, "Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX", Materials Science Forum, Vols. 338-342, pp. 525-528, 2000
Online since
May 2000
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Price
$32.00
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