Paper Title:
Structural Characteristics of 3C-SiC Films Epitaxially Grown on the Si/Si3N4/SiO2 System
  Abstract

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Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
529-532
DOI
10.4028/www.scientific.net/MSF.338-342.529
Citation
S. Zappe, H. Möller, G. Krötz, M. Eickhoff, W. Skorupa, E. Obermeier, J. Stoemenos, "Structural Characteristics of 3C-SiC Films Epitaxially Grown on the Si/Si3N4/SiO2 System", Materials Science Forum, Vols. 338-342, pp. 529-532, 2000
Online since
May 2000
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