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Thermal Decomposition Cavities in Physical Vapor Transport Grown SiC

Journal Materials Science Forum (Volumes 338 - 342)
Volume Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 55-58
DOI 10.4028/www.scientific.net/MSF.338-342.55
Citation Edward M. Sanchez et al., 2000, Materials Science Forum, 338-342, 55
Authors Edward M. Sanchez, V.D. Heydemann, David W. Snyder, Gregory S. Rohrer, Marek Skowronski
Keywords Physical Vapor Transport Growth, Pinholes, PVT, Sublimation Growth
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