Paper Title:
Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry
  Abstract

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Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
575-578
DOI
10.4028/www.scientific.net/MSF.338-342.575
Citation
O.P. A. Lindquist, H. Arwin, U. Forsberg, P. Bergman, K. Järrendahl, "Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry", Materials Science Forum, Vols. 338-342, pp. 575-578, 2000
Online since
May 2000
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Price
$32.00
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