Paper Title:
Characterization of 3C-SiC/SOI Deposited with HMDS
| Periodical |
Materials Science Forum (Volumes 338 - 342)
|
| Main Theme |
Silicon Carbide and Related Materials - 1999
|
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
599-602 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.599 |
| Citation |
N. Planes et al., 2000, Materials Science Forum, 338-342, 599 |
| Authors |
N. Planes, P. Dupel, M. Ravetz, Sylvie Contreras, Patrice Vicente, Thierry Chassagne, B. Fraisse, Jean Camassel, Yves Monteil, S. Rushworth |
| Keywords |
Cubic SiC, HMDS, SOI Substrates |
| Price |
US$ 28,- |