Paper Title:
Characterization of 3C-SiC/SOI Deposited with HMDS
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
599-602
DOI
10.4028/www.scientific.net/MSF.338-342.599
Citation
N. Planes, P. Dupel, M. Ravetz, S. Contreras, P. Vicente, T. Chassagne, B. Fraisse, J. Camassel, Y. Monteil, S. Rushworth, "Characterization of 3C-SiC/SOI Deposited with HMDS", Materials Science Forum, Vols. 338-342, pp. 599-602, 2000
Online since
May 2000
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Price
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