Paper Title:

Characterization of 3C-SiC/SOI Deposited with HMDS

Periodical Materials Science Forum (Volumes 338 - 342)
Main Theme Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 599-602
DOI 10.4028/www.scientific.net/MSF.338-342.599
Citation N. Planes et al., 2000, Materials Science Forum, 338-342, 599
Authors N. Planes, P. Dupel, M. Ravetz, Sylvie Contreras, Patrice Vicente, Thierry Chassagne, B. Fraisse, Jean Camassel, Yves Monteil, S. Rushworth
Keywords Cubic SiC, HMDS, SOI Substrates
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