Paper Title:
Photoluminescence and DLTS Measurements of 15MeV Erbium Implanted 6H and 4H SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
639-642
DOI
10.4028/www.scientific.net/MSF.338-342.639
Citation
Y. Shishkin, W. J. Choyke, R. P. Devaty, N. Achtziger, T. Opfermann, W. Witthuhn, "Photoluminescence and DLTS Measurements of 15MeV Erbium Implanted 6H and 4H SiC", Materials Science Forum, Vols. 338-342, pp. 639-642, 2000
Online since
May 2000
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