Paper Title:
Photoluminescence and DLTS Measurements of 15MeV Erbium Implanted 6H and 4H SiC
| Periodical |
Materials Science Forum (Volumes 338 - 342)
|
| Main Theme |
Silicon Carbide and Related Materials - 1999
|
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
639-642 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.639 |
| Citation |
Y. Shishkin et al., 2000, Materials Science Forum, 338-342, 639 |
| Authors |
Y. Shishkin, Wolfgang J. Choyke, Robert P. Devaty, N. Achtziger, Th. Opfermann, W. Witthuhn |
| Keywords |
1.54μm Luminescence, Deep Level, DLTS, Erbium, Implantation |
| Price |
US$ 28,- |