Paper Title:

Photoluminescence and DLTS Measurements of 15MeV Erbium Implanted 6H and 4H SiC

Periodical Materials Science Forum (Volumes 338 - 342)
Main Theme Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 639-642
DOI 10.4028/www.scientific.net/MSF.338-342.639
Citation Y. Shishkin et al., 2000, Materials Science Forum, 338-342, 639
Authors Y. Shishkin, Wolfgang J. Choyke, Robert P. Devaty, N. Achtziger, Th. Opfermann, W. Witthuhn
Keywords 1.54μm Luminescence, Deep Level, DLTS, Erbium, Implantation
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